Silicon device processing : proceedings of a symposium held at Gaithersburg, Maryland, June 2-3, 1970 /

Silicon device processing : proceedings of a symposium held at Gaithersburg, Maryland, June 2-3, 1970 /

Detalles Bibliográficos
Autores Corporativos: Symposium on Silicon Device Processing Gaithersburg, E.U.A, American Society for Testing and Materials . Committee F-1 on Materials for Electron Devices and Micro-electronics
Otros Autores: Marsden, Charles P
Formato: Procedimiento de la Conferencia Libro
Idioma:Ingles
Publicado: Washington : For sale by the Supt. of Docs., U.S. G.P.O., 1970.
Colección:Special publ. / E.U.A. National Bureau of Standards; 337
Materias:
Silicón > Congresos.
Descripción
Notas:CODEN: XNBSA
Under the Sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards
A United States Dept. of Commerce Publ
Descripción Física:x, 457 p. : il. ; 27 cm.
Bibliografía:Incluye bibliografías

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